Versum Materials Introduces Smart, Fab-wide Heat Sourcing and Control for Electronic Specialty Gases in Semiconductor Fabs

The GASGUARD® eV temperature control system now features remote-mount
options, assuring continuous gas flow for safety and reliability.

TEMPE, Ariz.–(BUSINESS WIRE)–$VSM #chemicals–Versum Materials, Inc. (NYSE: VSM), a leading materials supplier to the
semiconductor industry, announced today that has significantly upgraded
its GASGUARD
eV temperature control system by adding a remote-mount controller
option. The system delivers smart, state-of-the-art heat sourcing and
control of specialty gases that require heating before delivery to the
tool in semiconductor manufacturing fabs.

ÔÇ£First introduced in 2016, the GASGUARD eV temperature control system
has proven to reduce the cost of heating, increase performance and
enhance the user experience in delivering safe and reliable temperature
control,ÔÇØ said Kerry M. Lanza, product manager for the Versum Materials
GASGUARD Delivery Systems and Services Group (DS&S).

The newly enhanced system lowers cost of ownership, improves uptime and
simplifies troubleshooting with top and remote mount options and a
smaller footprint. The fully certified, code-compliant eV model includes
an electrochemical compression heater/controller and a gas cabinet with
two 700-watt blankets and two heat traces to accommodate two A or B size
cylinders. It also includes a GASGUARD AP11 controller, which provides
integrated monitoring and control and offers a single power feed with
optional dual power.

ÔÇ£Our customers reported that eV temperature control technology provides
steady and precise temperature and pressure control, enhanced
Proportional, Integral, Derivative (PID) temperature control,
overheating protection and continuous monitoring. Equally important, our
system ensures an uninterrupted flow of gas with no temperature peaks
and valleys,ÔÇØ said Lanza, adding that the eV system has proven its value
as an element in the ÔÇ£smart manufacturingÔÇØ methods adopted in todayÔÇÖs
fabs.

According to Lanza, about one-third of the gas delivery systems sold by
Versum Materials use heating to flow low-temperature gases and the
Company strives to improve the systems flexibility by taking temperature
control technology anywhere on the floor where it is needed.

More than 60 years of experience backs GASGUARD gas and chemicals
delivery systems for the semiconductor, thin-film-transistor (TFT) LCD
and photovoltaics industry. These delivery systems include automatic,
semiautomatic and manual versions in a variety of configurationsÔÇöfrom a
single source to a multiple cylinder source and purge system and can
accommodate the full range of hazardous gases: flammable, pyrophoric,
corrosive, toxic and highly-toxic, all tailored to meet specific
manufacturing needs.

Built on a legacy of more than 30 years of manufacturing and supplying
some 30,000 advanced materials and delivery systems, Versum Materials
continues to design and build safer, more reliable delivery equipment
for high-purity gas and liquid distribution.

For more information on eV temperature control and other technology,
please visit https://www.versummaterials.com/products/product-directory/featured-products/.

About Versum Materials

Versum Materials, Inc. (NYSE: VSM) is a leading electronic materials
company providing high-purity chemicals and gases, delivery systems,
services and materials expertise to meet the evolving needs of the
global semiconductor and display industries. Derived from the Latin word
for ÔÇ£toward,ÔÇØ the name ÔÇ£VersumÔÇØ communicates the companyÔÇÖs deep
commitment to helping customers move toward the future by collaborating,
innovating and creating cutting-edge solutions.

A global leader in technology, quality, safety and reliability, Versum
Materials is one of the worldÔÇÖs leading suppliers of next-generation CMP
slurries, ultra-thin dielectric and metal film precursors, formulated
cleans and etching products, and delivery equipment that has
revolutionized the semiconductor industry. Versum Materials has annual
sales of approximately US $1.1 billion, 2,200 employees and 12 major
facilities in Asia and North America. It is headquartered in Tempe,
Arizona. Prior to its separation on Oct. 1, 2016, Versum Materials had
operated for more than three decades as a division of Air Products and
Chemicals, Inc. (NYSE: APD).

For additional information, please visit http://www.versummaterials.com.

GASGUARD, the Versum Materials logo and Versum are trademarks of Versum
Materials, Inc. or its affiliates.

Contacts

Versum Materials, Inc.
Investor Inquiries:
Soohwan Kim
[email protected]
or
Media
Inquiries:
Tiffany Zinn
[email protected]