EUV Photoresist Pioneer Inpria Raises $23.5 Million in Series B Funding Led by Samsung Ventures

Inpria Brings Together Industry Leaders to Scale Enabling Materials
for EUV Lithography

CORVALLIS, Ore.–(BUSINESS WIRE)–Inpria, a pioneer in high-resolution metal oxide photoresists for
extreme ultraviolet lithography (EUV), today announced that it has
secured $23.5 million in Series B funding from a stellar syndicate
representing leading players from across the semiconductor manufacturing
ecosystem. This new financing was led by existing investor, Samsung
Ventures, and included participation from current investors ALIAD (Air
Liquide’s venture capital investment arm), Applied Ventures (the venture
capital arm of Applied Materials, Inc.), and Intel Capital. Leading
photoresist supplier JSR Corporation also joined this round as a new
investor. Fueled by growing customer demand, Inpria will use the funds
to complete its pilot manufacturing facility and to commence commercial
production. The company intends to grow its workforce to support more
customer engagements through the joint development of integrated
processes for the industry’s most advanced production environments.

“The photoresist that Inpria has pioneered is innovative and
demonstrates promise,” said Dong-Su Kim, General Manager of Samsung
Ventures America. “We are excited to broaden and deepen our corporate
partnership and support Inpria to deliver on its potential through the
investment.”

Comprised of tin-oxide molecules, Inpria photoresists offer greatly
improved resolution with building blocks a fraction the size of
traditional polymer-based resists. At the same time, these materials can
quadruple the efficiency with which EUV photons are absorbed, thereby
improving sensitivity and reducing pattern variability. With
unparalleled etch selectivity, Inpria photoresists (essentially
patternable hardmasks) enable simpler manufacturing flows and larger
process windows for an overall reduction in manufacturing cost.

“This strong strategic backing from ecosystem players, including
customers as well as equipment and material partners, signals their
shared excitement and confidence in the importance of our products to
benefit EUV lithography specifically, and more generally the entire
semiconductor industry,” said Andrew Grenville, CEO of Inpria. “We are
privileged to work closely with these strategic partners in ensuring
that our materials are compatible with all aspects of equipment and
process requirements. Inpria remains focused on the execution of our
growth plan in order to enable, support and accelerate the adoption of
EUV lithography in manufacturing.”

About Inpria

Inpria Corporation designs photoresists to unlock the full potential of
EUV lithography. Inpria’s metal oxide photoresists for EUV enable
superior performance with simplified processing. By focusing on emerging
requirements, Inpria has developed the only purpose-built solution to
support EUV lithography at the 7nm process node and beyond. Learn more
at www.inpria.com.

About Samsung Ventures

Samsung Venture Investment Corporation manages investment and
investment-related activities for Samsung affiliate companies. The
investment mandate for Samsung Venture Investment Corporation tracks
closely to the strategic priorities of Samsung affiliate companies’ core
operating divisions, and encompasses investments in semiconductors,
displays, telecommunications, and consumer electronics.

About ALIAD

Created in 2013, ALIAD’s role is to acquire minority equity stakes in
innovative technology start-ups in order to foster Air Liquide’s access
to technological innovations developed outside the Group. These equity
investments are accompanied by the implementation of preferred R&D
and/or business agreements between these start-ups and Air Liquide group
entities. ALIAD targets three sectors of investment related to important
social changes: energy transition, healthcare, digital.

For more information visit www.airliquide.com/connected-innovation/aliad-venture-capital.

About Applied Ventures

Applied Ventures, LLC, the venture capital arm of Applied Materials,
invests in early-stage technology companies that promise to deliver high
growth and exceptional returns. Our investments help develop
technologies and markets that provide natural extensions to Applied
Materials’ core business and stimulate the growth of applications for
semiconductors, displays, and related products and services. Learn more
at www.appliedventures.com.

About Intel Capital

Intel Capital, Intel’s strategic investment organization, invests in
innovative startups targeting computing and smart devices, 5G
connectivity, cloud, datacenter, artificial intelligence, merged
reality, autonomous driving, the Internet of Things, robotic
technologies, immersive entertainment and semiconductor manufacturing.
Since 1991, Intel Capital has invested US$12.2 billion in 1,480
companies worldwide, and 627 portfolio companies have gone public or
been acquired. Through its business development programs, Intel Capital
curates thousands of introductions each year between its portfolio
executives and Intel’s customers and partners in the Global 2000. For
more information on what makes Intel Capital one of the world’s most
powerful venture capital firms, visit www.intelcapital.com
or follow @Intelcapital.

About JSR Corporation

JSR Corporation is a multinational company employing more than 6,000
people worldwide and a leading materials supplier in a variety of
technology driven markets. JSR’s global network is headquartered in
Tokyo (Japan) and has factories and offices in Europe, USA, China,
Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented
organization that pursues close collaborations with leading innovators
in a number of industries that are a key to the present and future
welfare of human society: life-sciences, energy storage, synthetic
rubbers, electronic materials, display and optical materials. For more
information about JSR Corporation, please go to www.jsr.co.jp.

Contacts

Inpria Corporation
Ann Carney Nelson, (541) 844.2812
[email protected]